Electrolyte composition and method for the electrolytic deposition of layers containing palladium

摘要

The electrolytic composition comprises a source of palladium ion, sulfur-based acid and surfactant. The sulfur-based acid is selected from sulfonic acid and/or sulfuric acid. The surfactant is selected from sulfopropylated polyalkoxylated naphthol, naphthalene sulfonic acid and/or formaldehyde polycondensate. The electrolytic composition comprises a source of palladium ion, sulfur-based acid and surfactant. The sulfur-based acid is selected from sulfonic acid and/or sulfuric acid. The surfactant is selected from sulfopropylated polyalkoxylated naphthol, naphthalene sulfonic acid and/or formaldehyde polycondensate. The source of palladium ion is selected from palladium dichloride (PdCl2), palladium dibromide (PdBr2), palladium sulfate (PdSO4), palladium nitrate (Pd(NO3)2), palladium oxide (PdO), diamminepalladium hydroxide (Pd(NH3)2(OH)2), dichlorodiamminepalladium (Pd(NH3)2Cl2), dinitrodiamminepalladium (Pd(NH3)2(NO3)2), dichlorotetraamminepalladium (Pd(NH3)4Cl2), dibromotetraamminepalladium (Pd(NH3)4Br2), tetraamminepalladium diiodide (Pd(NH3)4I2), tetraamminepalladium dinitrite (Pd(NH3)4(ONO)2), tetraamminepalladium dinitrate (Pd(NH3)4(NO3)2), tetraamminepalladium disulfite (Pd(NH3) 4 (SO3) 2), tetraamminepalladium disulfate (Pd(NH3) 4 (SO4) 2), dinitrotetraamminepalladium (Pd(NH3)4(NO2)2), dibromodiamminepalladium (Pd (NH3)2Br2), diamminepalladium diiodide (Pd(NH3)2I2), diamminepalladium dinitrite (Pd(NH3)2(ONO)2), diamminepalladium dinitrate (Pd(NH3)2(NO3)2), diamminepalladium disulfite (Pd(NH3)2(SO3)2), diamminepalladium disulfate (Pd(NH3)2(SO4)2) and/or dinitrodiamminepalladium (Pd(NH3)2(NO2)2), preferably palladium dichloride (PdCl2) , palladium dibromide (PdBr2), palladium sulfate (PdSO4), palladium nitrate (Pd(NO3)2), palladium oxide (PdO), diamminepalladium hydroxide (Pd(NH3)2(OH)2), dichlorodiamminepalladium (Pd(NH3)2C12), dinitrodiamminepalladium (Pd (NH3)2(NO3)2), and/or dichlorotetraamminepalladium (Pd(NH3)4Cl2). The sulfur-based acid is preferably sulfonic acid selected from monosulfonic acid and/or disulfonic acid. The sulfonic acid is an alkyl sulfonic acid or an alkyl disulfonic acid having 1-4 carbon atoms preferably 1-2 carbon atoms. The electrolytic composition further comprises a sulfur-containing amino acid. The sulfur-containing amino acid is selected from salts or derivatives of cysteine, methionine, homocysteine, cystathionine, alliin, allyl cysteine, cystine, ethionine, N- Formylmethionine and/or methylmethionine, preferably cysteine, methionine, homocysteine and/or cystathionine. The surfactant is in the form of an alkali salt. The electrolytic composition further contains a source of alloying metal ions. The alloying metal ion is a source of copper ions.