| 摘要 |
This invention provides blanks for a gray tone mask, comprising a light shielding film and a semi-light-transparent film, adhered directly or indirectly onto a surface of a transparent substrate, wherein the light shielding film and the semi-light-transparent film are different from each other in the composition of the metal component, and the semi-light-transparent film is composed of Ni or composed of Ni as a main component and a metal component excluding Cr and Mo. There is also provided a process for producing a gray tone mask, comprising etching a light shielding film and a semi-light-transparent film by two-liquid etching with a Cr etching liquid (ceric nitrate + perchloric acid system) as a first etching liquid and an ITO etching liquid (HCl + FeCl3) or an FeCl3 solution as a second etching liquid in that order, forming an mask opening part, and then forming a semi-light-transparent part by half etching with a single etching liquid of a Cr etching liquid which can selectively wet-etch only the light shielding film.
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