发明名称 Apparatus, method and system for providing enhanced mechanical protection for thin beams
摘要 <p>An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.</p>
申请公布号 EP1431240(B1) 申请公布日期 2008.02.27
申请号 EP20030024408 申请日期 2003.10.23
申请人 ROBERT BOSCH GMBH 发明人 PAN, ZHIYU;FREY, WILHELM;NIENDORF, ANDREAS
分类号 B81B3/00;G02B26/10;B81B7/00;G02B26/08 主分类号 B81B3/00
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