发明名称 |
Apparatus, method and system for providing enhanced mechanical protection for thin beams |
摘要 |
<p>An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.</p> |
申请公布号 |
EP1431240(B1) |
申请公布日期 |
2008.02.27 |
申请号 |
EP20030024408 |
申请日期 |
2003.10.23 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PAN, ZHIYU;FREY, WILHELM;NIENDORF, ANDREAS |
分类号 |
B81B3/00;G02B26/10;B81B7/00;G02B26/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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