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发明名称
摘要
申请公布号
JP4053055(B2)
申请公布日期
2008.02.27
申请号
JP20050121852
申请日期
2005.04.20
申请人
发明人
分类号
C23C22/06;C23C22/07;C23C22/23;C23F1/00;C23F1/10;C23F1/34;G09F9/00;H05K9/00
主分类号
C23C22/06
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