METHODOLOGY AND DEVICE TO CONFINE PLASMA AND TO REDUCE FLOW RESISTANCE IN A PLASMA REACTOR,申请号KR20040026448-传众专利搜索

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发明名称	METHODOLOGY AND DEVICE TO CONFINE PLASMA AND TO REDUCE FLOW RESISTANCE IN A PLASMA REACTOR
摘要
申请公布号	KR100807861(B1)	申请公布日期	2008.02.27
申请号	KR20040026448	申请日期	2004.04.17
申请人		发明人
分类号	H01L21/3065;H01J37/32	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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