METHOD FOR IMPROVING SURFACE ROUGHNESS OF PROCESSED FILM OF SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE,申请号EP20040745451-传众专利搜索

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发明名称	METHOD FOR IMPROVING SURFACE ROUGHNESS OF PROCESSED FILM OF SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE
摘要
申请公布号	EP1632992(A4)	申请公布日期	2008.02.27
申请号	EP20040745451	申请日期	2004.05.31
申请人	TOKYO ELECTRON LIMITED	发明人	INATOMI, YUICHIRO
分类号	H01L21/027;G03F7/40;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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