| 摘要 |
A light modulator device (200, 300, 300-1, 300-2) includes a bottom charge plate (210, 310), a top charge plate (540, 640, 650), and a pixel plate (205, 305) supported by at least one flexure (235, 335, 335-1), wherein the flexure (235, 335, 335-1) is a piece-wise linear flexure (235, 335, 335-1). |
