发明名称 |
Method of structuring of a subtrate |
摘要 |
The invention relates to a method of structuring of a substrate by providing a polymerization starter layer on the substrate, applying a radiation field on the polymerization starter layer for selectively reducing a density of polymerization starters of the polymerization starter layer, applying monomers and then polymerizing of the monomers, the polymerization being initiated by the starters of the polymerization starter layer, and structuring the substrate using the polymerized monomers as a mask.
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申请公布号 |
US7335461(B2) |
申请公布日期 |
2008.02.26 |
申请号 |
US20060460005 |
申请日期 |
2006.07.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KRAUSE RAINER KLAUS;SCHMIDT MARKUS |
分类号 |
G03F7/00;G03F7/004;H01L21/027;H01L21/312 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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