| 摘要 |
Cooling equipment of a diffuse furnace device is provided to reduce a cooling time in the diffuse furnace by exhausting rapidly heated air generated from a heat block through a duct. An inner tube(2) is used for executing a process in a diffuse furnace. An outer tube(3) surrounds the inner tube. A heat block(4), which is installed at an outer of the outer tube, constantly maintains temperature in the inner tube. A cooling unit(6), which is installed at an outer of the heat block, cools temperature heated in the heat block to prevent over heat. An air nozzle, which is installed between the inner and outer tubes, sprays compressed air after diffusion process. A duct, which is installed at an upper portion of the heat block, exhausts the heated air from the inner tube. A main duct(7) exhausts the heated air generated through the duct to outside.
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