发明名称 Method and device for CMOS image sensing with separate source formation
摘要 A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the first well, and the second gate region is associated with the second well. Additionally, the method includes forming a third well in the substrate, implanting a first plurality of ions to form a first lightly doped source region and a first lightly doped drain region in the first well, implanting a second plurality of ions to form at least a second lightly doped drain region in the second well, and implanting a third plurality of ions to form a source in the second well.
申请公布号 US7335546(B2) 申请公布日期 2008.02.26
申请号 US20050185444 申请日期 2005.07.19
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 YANG JIANPING;XIN CHUNYAN;HUO JIEGUANG;WANG YANYONG
分类号 H01L21/8238;H01L31/00 主分类号 H01L21/8238
代理机构 代理人
主权项
地址