发明名称 Semiconductor device and method for fabricating the same
摘要 An N-channel transistor includes: an N-type source region, a gate electrode, a P-type body region, an N-type drain offset region, and a drain contact region, which is an N-type drain region. The transistor further includes a gate insulating film that has a thin oxide silicon film (a thin film portion) and a LOCOS film (a thick film portion). The body region has an impurity profile in which the concentration reaches a maximum value near the surface and decreases with distance from the surface. The drain offset region has an impurity profile that has an impurity-concentration peak in a deep portion located a certain depth-extent below the lower face of the LOCOS film.
申请公布号 US7335549(B2) 申请公布日期 2008.02.26
申请号 US20050124261 申请日期 2005.05.09
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 MATSUI OSAMU;SATO YOSHINOBU
分类号 H01L21/00;H01L29/78;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/786 主分类号 H01L21/00
代理机构 代理人
主权项
地址