发明名称 |
Semiconductor device and method for fabricating the same |
摘要 |
An N-channel transistor includes: an N-type source region, a gate electrode, a P-type body region, an N-type drain offset region, and a drain contact region, which is an N-type drain region. The transistor further includes a gate insulating film that has a thin oxide silicon film (a thin film portion) and a LOCOS film (a thick film portion). The body region has an impurity profile in which the concentration reaches a maximum value near the surface and decreases with distance from the surface. The drain offset region has an impurity profile that has an impurity-concentration peak in a deep portion located a certain depth-extent below the lower face of the LOCOS film.
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申请公布号 |
US7335549(B2) |
申请公布日期 |
2008.02.26 |
申请号 |
US20050124261 |
申请日期 |
2005.05.09 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
MATSUI OSAMU;SATO YOSHINOBU |
分类号 |
H01L21/00;H01L29/78;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/786 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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