发明名称 DRAM memory having vertically arranged selection transistors
摘要 Memory cell having a trench capacitor that is constructed in a lower region of a substantially perpendicular trench hole, and which comprises an inner and an outer electrode, a dielectric layer being arranged between the inner and the outer electrodes, a vertical selection transistor that has a substantially perpendicular channel region, which is constructed adjacent to an upper region of the trench hole and which connects the inner electrode of the trench capacitor to a bit line, it being possible to construct a conductive channel as a function of the potential of a word line in the channel region, the channel region partially enclosing the trench hole in its upper region, and the associated work line at least partially surrounding the channel region.
申请公布号 US7335936(B2) 申请公布日期 2008.02.26
申请号 US20030744051 申请日期 2003.12.23
申请人 INFINEON TECHNOLOGIES AG 发明人 SOMMER MICHAEL;ENDERS GERHARD
分类号 H01L29/72;G11C11/404;H01L21/334;H01L21/8234;H01L21/8242;H01L27/108 主分类号 H01L29/72
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