发明名称 Thin film transistor using a metal induced crystallization process and method for fabricating the same and active matrix flat panel display using the thin film transistor
摘要 Provided is a thin film transistor that may be manufactured using Metal Induced Crystallization (MIC) and method for fabricating the same. Also provided is an active matrix flat panel display using the thin film transistor, which may be created by forming a crystallization inducing metal layer below a buffer layer and diffusing the crystallization inducing metal layer. The thin film transistor may include a crystallization inducing metal layer formed on an insulating substrate, a buffer layer formed on the crystallization inducing metal layer, and an active layer formed on the buffer layer and including source/drain regions, and including polycrystalline silicon crystallized by the MIC process.
申请公布号 US7335917(B2) 申请公布日期 2008.02.26
申请号 US20040992856 申请日期 2004.11.22
申请人 SAMSUNG SDI CO., LTD. 发明人 KOO JAE-BON;LEE SANG-GUL
分类号 G02F1/136;H01L29/94;H01L21/00;H01L21/20;H01L21/77;H01L21/84;H01L27/01;H01L27/12;H01L29/786;H01L31/0392 主分类号 G02F1/136
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