发明名称 |
Structures for supporting vibrators and devices for measuring physical quantities |
摘要 |
A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14 A, 14 B fixed to the substrate 12 and connected with the vibrator 1 . The vibrator 1 is supported with the bonding wires so that the vibrator 1 is not directly contacted with the substrate 12 . "fd" and "fw" satisfy the following formula (1). "fd" represents a resonance frequency of a driving vibration mode of the vibrator and "fw" represents a characteristic frequency of a vibration mode of the bonding wire at room temperature. <?in-line-formulae description="In-line Formulae" end="lead"?>(fd/2)x1.05<=fw, or, fw<=(fd/2)x0.95. (1)<?in-line-formulae description="In-line Formulae" end="tail"?> |
申请公布号 |
US7334473(B2) |
申请公布日期 |
2008.02.26 |
申请号 |
US20050214455 |
申请日期 |
2005.08.29 |
申请人 |
NGK INSULATORS, LTD.;SEIKO EPSON CORPORATION |
发明人 |
HAYASHI SHIGEKI;KIKUCHI TAKAYUKI;KINOSHITA YUSUKE |
分类号 |
G01P9/04 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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