发明名称 Structures for supporting vibrators and devices for measuring physical quantities
摘要 A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14 A, 14 B fixed to the substrate 12 and connected with the vibrator 1 . The vibrator 1 is supported with the bonding wires so that the vibrator 1 is not directly contacted with the substrate 12 . "fd" and "fw" satisfy the following formula (1). "fd" represents a resonance frequency of a driving vibration mode of the vibrator and "fw" represents a characteristic frequency of a vibration mode of the bonding wire at room temperature. <?in-line-formulae description="In-line Formulae" end="lead"?>(fd/2)x1.05<=fw, or, fw<=(fd/2)x0.95. (1)<?in-line-formulae description="In-line Formulae" end="tail"?>
申请公布号 US7334473(B2) 申请公布日期 2008.02.26
申请号 US20050214455 申请日期 2005.08.29
申请人 NGK INSULATORS, LTD.;SEIKO EPSON CORPORATION 发明人 HAYASHI SHIGEKI;KIKUCHI TAKAYUKI;KINOSHITA YUSUKE
分类号 G01P9/04 主分类号 G01P9/04
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