发明名称 Apparatus for and method of manufacturing a single crystal rod
摘要 An apparatus is provided for manufacturing a single crystal rod from a poly crystal feed rod including a closed chamber at which chamber the feed rod is located. The chamber has an annular energy supply arranged around the feed rod for melting off the one end of the rod for providing single crystals. Actuators are provided, for axial movement of the feed rod and for a rotating relative movement between the feed rod and the annular energy supply The apparatus further includes components for recording and regulating the distance between the surface of the feed rod and an annular inwardly radially facing reference face associated with the energy supply The resulting apparatus and method that enable use of irregular feed rods that assume other shapes than the optimal cylindrical shape and also enable use of curved cylindrical and elliptical rods with irregular surfaces.
申请公布号 US7335257(B2) 申请公布日期 2008.02.26
申请号 US20050545187 申请日期 2005.11.08
申请人 TOPSIL SEMICONDUCTOR MATERIALS A/S 发明人 JENSEN LEIF;PETERSEN JAN EYVING;VABENGARD PER
分类号 C30B13/02;C30B13/00;C30B13/16;C30B13/20;C30B13/30;C30B13/32 主分类号 C30B13/02
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