| 摘要 |
A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.
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