METHOD AND EQUIPMENT FOR GRATING FORMATION

摘要

The invention relates to laser technologies and is intended for methods and equipment for direct formation of gratings in a thin metal film on the transparent substrate when a beam of the pulsed laser radiation is directed and focused to the metal film and causes melting of the metal in focal area. The novelty is that the beam of the pulsed laser radiation is focused to the prolated spot on the metal film, in which periodical grating forms in the irradiated area due to self-organization of residues of the melted metal. The required length of the grating lines is formed by shifting the laser spot on the metal film along the grating line direction is such a way that the shifted laser spot overlaps partially with the previous spot and ensuresa ceaseless extension of lines of the periodic grating.