| 摘要 |
A resonance type device for controlling a high voltage having a capacitive load property is provided to have a high-efficiency characteristic by maintaining an operation point in an inductive mode. A resonance type device for controlling a high voltage having a capacitive load characteristic includes an LC filter(200), an inverter(300), a resonance reactor(400), a blocking condenser(500), a transformer(600), a plasma reacting unit(700), a control unit(800), and a gate driving unit(900). The LC filter reduces a ripple of a voltage outputted from a rectifier(100). The inverter transforms a direct current voltage outputted from the LC filter into an alternating current pulse voltage. The resonance reactor is used for the load matching of the plasma reacting unit. The control unit forms a control signal in a pulse width modulating method when a voltage of the plasma reacting unit reaches a pulse frequency modulation reference voltage. |
