| 摘要 |
A direct-touch type metal diaphragm valve enabling a remarkable increase in the durability of a valve, i.e., the assured number of times of continuous opening and closing operations thereof under the condition that a proper flow coefficient Cv is maintained and a reduction in the change of the value of Cv with time by suppressing the deformation of a valve seat with time. In the metal diaphragm valve, a metal diaphragm is formed in a circular reverse pan shape formed of a laminate comprising multiple stainless steel sheets and multiple nickel-cobalt alloy sheets and swelled upward at its center part. The distance of 55 to 70% of the maximum swelled height h of the metal diaphragm is restricted to the maximum value stroke of the valve.
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