VACUUM GAUGE USING HOT PLATE AND CANTILEVER

摘要

A vacuum gauge using a heating plate and a cantilever is provided to massively manufacture vacuum gauges and to measure degree of vacuum outside vacuum space. A vacuum gauge includes a heating plate(1), a cantilever(2), and a computer(3). The heating plate is heated by external power and heats particles in a vacuum space. The cantilever is installed in parallel with the heating plate at one side of the heating plate. The cantilever is deformed by movement of the particles heated by the heating plate. The computer calculates pressure of the vacuum space from deformation of the cantilever deformed by the heated particles. A piezoresistor, which is installed at the cantilever, has various resistances according the deformation of the cantilever. The resistance of the piezoresistor is transmitted to the computer.