发明名称 |
METHOD FOR PATTERNING BY SURFACE MODIFICATION |
摘要 |
A method of patterning surface modification by (a) positioning a repositionable aperture mask in proximity to a substrate, and (b) selectively exposing a portion of the substrate to a surface modification treatment, wherein the exposed portion is defined by one or more apertures in the aperture mask.
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申请公布号 |
KR20080016781(A) |
申请公布日期 |
2008.02.22 |
申请号 |
KR20077015909 |
申请日期 |
2007.07.12 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
THEISS STEVEN D.;DUNBAR TIMOTHY D. |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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