发明名称 DRAWING DEVICE AND DRAWING METHOD
摘要 <p>An image is highly accurately drawn by correcting an error due to waving or defective optical characteristics of a photosensitive material (12) and by preventing an appearance of irregularity in the drawing caused by a defect in micromirrors (58). To achieve this, a part of the micromirrors (58) constructing a DMD (36) is adapted to serve as a use region (84a) and the remaining part as a non-use region (84b), pixels (92) are formed on a photosensitive material (12) with the width of the DMD set narrower relative to a scan direction, and multiplex exposure using the micro mirrors (58) is performed to form each of the pixels (92).</p>
申请公布号 KR20080016849(A) 申请公布日期 2008.02.22
申请号 KR20077029044 申请日期 2007.12.12
申请人 FUJIFILM CORPORATION 发明人 SUMI KATSUTO
分类号 G03F7/20;G02B26/08;H01L21/027 主分类号 G03F7/20
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