BLANKS FOR GRAY TONE MASK, GRAY TONE MASK USING SAID BLANKS, AND PROCESS FOR PRODUCING SAID BLANKS

摘要

This invention provides blanks for a gray tone mask, having a pattern comprising a light shielding part, an opening, and a semi-light-transparent part. A light shielding film and a semi-light-transparent film are adhered directly or indirectly on a surface of a transparent substrate. The light shielding film and the semi-light-transparent film are different from each other in the composition of the metal component in the light shielding film and the semi-light-transparent film. There is also provided a process for producing a gray tone mask, comprising etching a light shielding film and a semi-light-transparent film with a first etching liquid, which can etch the light shielding film and the semi-light-transparent film at the same etching rate, and conducting half-etching with a second etching liquid which can selectively etch only the light shielding film without etching the semi-light-transparent film.