| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for solving a bottle neck generated by a specified processing unit by reducing the quantity of information transmitted from each processor element to the specified processing unit, in a device for inspecting an image defect detecting defects of sample surfaces appearing in each region partitioning a sensed image on the sample surface in parallel by using a plurality of the processor elements, and collecting the defect information of these defects detected in parallel in a series of the defect information by the specified processing unit. <P>SOLUTION: The device for inspecting the image defects is configured so that defect detecting processing S3 detecting the defects appearing in the sensed image on the sample surfaces, and reinspection processing S6 conducting reinspection or deciding truth or falsehood at a place of detection in the sensed image regarding the defects detected by the defect detecting processing are carried out by the same processor element. <P>COPYRIGHT: (C)2008,JPO&INPIT |
