| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deformable mirror which can be miniaturized in size, with respect to the deformable mirror provided with a lamination type piezoelectric actuator having large generation power. <P>SOLUTION: A conductive joint part which consists of two divided regions 7a, 7b and is jointed to the lamination type piezoelectric actuator 5 is disposed on a support base plate on which the deformable mirror is loaded. A first metal film 11, parted from a first region 11a and a second region 11b which are not electrically connected to each other is disposed on a joint surface 5a of the piezoelectric actuator 5. A second metal film 12, which electrically connects a first common electrode 10a to the first region 11a and connects a second common electrode 10b to the second region 11b, respectively, is disposed on a side surface of the piezoelectric actuator 5. The piezoelectric actuator 5 is disposed so that respective regions 11a, 11b of the first metal film 11 is electrically connected to different regions 7a, 7b of the joint part, respectively. <P>COPYRIGHT: (C)2008,JPO&INPIT |
