| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having high piezoelectric characteristics and satisfactory durability, to provide a method for manufacturing the piezoelectric element, and to provide an ink jet head having the piezoelectric element, improved displacement controllability, and superior durability. <P>SOLUTION: The piezoelectric element has a piezoelectric film on a substrate and a pair of electrodes in contact with the piezoelectric film, and utilizes a bending mode. The piezoelectric element has a domain made of a tetragonal crystal. The domain has a domain (a) made of a crystal in which a (100) plane is arranged in parallel with the film surface of the piezoelectric film. The domain (a) comprises: a domain A having a normal axis of a (001) plane so that it becomes parallel to the deflection direction of the piezoelectric film within a tolerance of ±6 degrees; and a domain B having a normal axis of a (001) plane so that it orthogonally crosses the direction of the deflection of the piezoelectric film mainly within a tolerance of ±6 degrees. The volume ratio of the domain A to the total volume of the domains A and B is larger than 50 vol.%. <P>COPYRIGHT: (C)2008,JPO&INPIT |
