| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a plurality of triaxial acceleration sensor having substantially different measurement ranges in a small area and at low cost and allow the directions of the acceleration detection axes of the plurality of sensors to coincide with each other with high precision. <P>SOLUTION: Within a frame section of a first triaxial acceleration sensor comprising the frame section, a weight section held by the frame section through two pairs of beam sections, and a semiconductor piezoresistive element provided on the beam sections, a second triaxial acceleration sensor is formed having a smaller output voltage per unit acceleration than that of the first triaxial acceleration sensor. Sharing the frame section can achieve downsizing, form them at once on one chip in processes such as photolithography and etching to reduce manufacturing costs, and allow the acceleration detection axes of the plurality of sensor elements to coincide with each other with high precision or with photolithographic mask precision. <P>COPYRIGHT: (C)2008,JPO&INPIT |
