| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve cleaning capacity with respect to a coating apparatus and a cleaning method used for the same. <P>SOLUTION: The coating apparatus is provided with a supply path 13 which enables coating Pa, Pb and cleaning liquid W to flow therein and allowing a downstream end to connect with a coating gun 30 and a helical member 40 arranged in the supply path 13. The cleaning liquid becomes swirling flow when passing through the helical membrane 40, and cleans the inner wall of the supply path 13 by flowing while helically rubbing the inner wall of the supply wall 13 which is located at the downstream side of the helical member 40. The swirling flow is more hardly changed to a laminar flow rather than turbulence, so that cleaning effect by the swirling flow is exhibited at an area at the downstream side which is separated from the helical member 40. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
