| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate support assembly having a protection layer for increasing plasma resistant property. <P>SOLUTION: The substrate support assembly includes an electrostatic chuck having an upper substrate support face, and a protection layer disposed on the electrostatic chuck. The protection layer is formed of a ceramic material containing a rare earth metal. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
