发明名称 INSTALLATION DEVICE FOR SURFACE TREATMENT SUCH AS PLASMA TREATMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent the quality of a product from being affected by treatment irregularities caused by an elevation pin for lifting an object to be treated from an installation section, and a pin hole. <P>SOLUTION: The object W to be treated is installed on the upper surface of the installation section 21 of an installation device 20 for plasma surface treatment. A product region Wb that should become a plurality of products, and a non-product region Wa that becomes a connection section for connecting adjacent product regions Wb are set to the object W to be treated. The pin hole 21p is formed at a part corresponding to the non-product region Wa of the installation section 21, and the elevation pin 23 for lifting the object W to be treated is provided at the pin hole 21p so that it can make frequent appearances. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008041760(A) 申请公布日期 2008.02.21
申请号 JP20060211085 申请日期 2006.08.02
申请人 SEKISUI CHEM CO LTD 发明人 MAYUMI SATOSHI;NAKANO YOSHINORI;MATSUZAKI JUNICHI
分类号 H01L21/683;B08B7/00;H01L21/3065 主分类号 H01L21/683
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