| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact-type probe, using a ball that can be easily rolled, even with a small amount of power which can inspect wire breakages and short circuits, while scanning a pattern electrode. SOLUTION: The contact-type probe uses a ball, and a large steel ball disposed between two small steel balls so as to make contact with either of the steel balls with magnetic force is used as a probe element. The probe element is linked to a small steel ball in a point-contact manner. The probe element can be displaced freely vertically. The probe element can be rolled even with a small amount of power. The probe can measure a pattern electrode for wire breakages and short circuits without damages, such as scratches. Furthermore, there is an advantage that the low contact resistance of the probe element causes less wear, and prolongs the lifetime of the probe. Since the steel ball, serving as the probe element, can be manufactured with a small diameter, the probe can be used for measuring micropatterns. COPYRIGHT: (C)2008,JPO&INPIT
|
