| 摘要 |
PROBLEM TO BE SOLVED: To achieve high measurement accuracy by preferentially sampling scattered ions with small scattering angles. SOLUTION: The device measures the energy spectrum of the scattered ions scattered from a sample onto which an ion beam 15 is irradiated, and includes an ion detector for detecting the scattered ions within a vacuum container in which a magnetic field is formed, and an aperture 16 for ion sorting provided between the ion detector and the sample. The aperture 16 has an opening allowing passage of the ion beam 15, has a specific scattering angle, and is provided at the position where only the ions converging at a specific position in the beam axis of the ion beam 15 pass through the opening by the magnetic field. A tapered face 36 and a tapered face 38 are formed in the peripheral part 16a of the opening 30. COPYRIGHT: (C)2008,JPO&INPIT
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