| 摘要 |
The invention provides a mini environment apparatus, an inspection apparatus, a manufacturing apparatus and a cleaning method of a space which can suppress an influence of a cleanliness of an external environment and can keep a target cleanliness of a specific space. The invention is provided with an outer dust collecting filter 3 a for covering an intake port 2 b of a casing 2 , an outer fan 3 b for flowing an air from an external environment into the casing 2 via the outer dust collecting filter 3 a, a clean chamber 4 a arranged within the casing 2 and having an intake port 4 b facing to a space within the casing 2 , an inner dust collecting filter 5 a for covering the intake port 4 b, an inner fan 5 b for flowing the air within the casing 2 into the clean chamber 4 a via the inner dust collecting filter 5 a, a pressure gauge 6 a measuring a pressure in an external environment of the casing 2 , a pressure gauge 6 b measuring a pressure within the casing 2 , a pressure gauge 6 c measuring a pressure within the clean chamber 4 a, and a control unit 7 for controlling rotating speeds of the fans 3 a , 5 a in such a manner that a measured pressure Pb within the casing 2 becomes higher at a set value P 1 than a measured pressure Pa in the external environment, and a measured pressure Pc within the clean chamber 4 a becomes higher at a set value P 2 than the measured pressure Pb within the casing 2.
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