| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for removing metal impurities in boron-based gas by which metal impurities present in boron-based gas can be reliably removed to obtain ultrahigh purity boron-based gas. SOLUTION: Metal impurities such as iron, copper, aluminum, nickel, magnesium, chromium, manganese and zinc present in boron-based gas such as B<SB>2</SB>H<SB>6</SB>, BF<SB>3</SB>and BCl<SB>3</SB>is removed to obtain ultrahigh purity boron-based gas by filtering the boron-based gas through a stainless steel sintered filter or bringing the gas into contact with stainless steel powder. COPYRIGHT: (C)2008,JPO&INPIT
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