| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in a method of replacing a positioning mark with a pattern of a substrate having no exclusive positioning mark, according to the kind of the substrate, that a positioning fault is caused by erroneous recognition due to resemblance of a shape of the pattern, in the case when the substrate is aligned with the mask. SOLUTION: This screen printing equipment has a first means which detects individually the screen mask and the pattern consisting of a part or the whole of an arbitrary pattern on the surface of the substrate, a second means which detects individually the respective centroids of the patterns being final positioning targets, an arithmetic means which computes, based on image measurement, deflections of the centers of windows of the patterns detected by the first and second means from the respective centroids of the patterns detected by the second means, a correcting means which calculates a correction coefficient from a numerical value computed by the arithmetic means, and a positioning means. COPYRIGHT: (C)2008,JPO&INPIT
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