| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid jetting head including a capacitor structure section of which the deterioration is suppressed by being formed in a sealed cavity, and to provide its manufacturing method. SOLUTION: This liquid jetting head includes a board 10, a pressure generating chamber 16 which is installed on the board 10, an elastic plate 20 which is installed above the board 10, the capacitor structure section 60, a porous layer 80, and a sealing layer 90 which is installed above the porous layer 80. In this case, the capacitor structure section 60 is installed above the elastic plate 20, and has a lower electrode layer 30, a piezoelectric element layer 40 and an upper electrode layer 50. The porous layer 80 is installed above the elastic plate 20 without coming into contact with the capacitor structure section 60. Then, a void section 72 is formed between the capacitor structure section 60 and the porous layer 80 for the liquid jetting head. COPYRIGHT: (C)2008,JPO&INPIT
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