| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprinting mold which exerts no effect on a fine pattern and has a permanent mold release function, and its manufacturing method. SOLUTION: The manufacturing method of the imprinting mold is characterized in that a seed layer is subjected to fluorination treatment without being peeled. This fluorinated immobile layer lowers the surface energy of the mold and develops an effect for enhancing the mold releasability of the mold. Since the seed layer formed of a phosphorus compound is subjected to fluorination treatment, the pattern dimension of the original plate is not changed, a pattern is faithfully transferred and the imprinting mold having a permanent mold release function is manufactured. COPYRIGHT: (C)2008,JPO&INPIT
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