Semiconductor Wafer Handler

摘要

A semiconductor wafer handler comprises a ring ( 70 ) attached to a hub ( 80 ) by a plurality of spokes ( 90 ). Vacuum is applied to the surface of the semiconductor wafer through orifices ( 100 ) containing in the ring ( 70 ). Water and/or nitrogen can be applied to the surface of the semiconductor wafer through orifices ( 110 ) contained in the spokes ( 90 ).