SAMPLE INSPECTION DEVICE, IMAGE ALIGNMENT METHOD AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for aligning a reference image and an optical image with high accuracy.

SOLUTION: A sample inspection device 100 in one embodiment of the invention includes: a difference decision section 308 that decides whether an absolute difference in pixel values in each pixel at the temporary alignment position of an optical image and a reference image is smaller than a threshold Δ or not; a least-square method displacement arithmetic circuit 322 that computes a displacement amount by using a normal matrix by a least-square method obtained from the results of difference decision; a position correction circuit 350 that corrects the alignment position of the optical image and the reference image to a position shifted by the displacement amount; and a comparison circuit 108 that compares the optical image with the reference image.

COPYRIGHT: (C)2008,JPO&INPIT