发明名称 ELECTRODE CONNECTION STRUCTURE AND CONDUCTIVE MEMBER OF SEMICONDUCTOR CHIP, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide an electrode connection structure and conductive members used for the structure of a semiconductor device that can realize a low-stress and high-reliability electrical connection without using bumps, a semiconductor device that makes lamination of semiconductor chips possible without arranging a through via in the semiconductor chip, and a manufacturing method for the same. <P>SOLUTION: The conductive member 5 to connect a primary electrode 11 of a lower layer and a secondary electrode 21 of an upper layer is arranged on a partial surface or the whole surface of a recess portion that is depressed in a horizontal direction formed in an adhesion layer 3 located between the primary electrode 11 and the secondary electrode. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008042169(A) 申请公布日期 2008.02.21
申请号 JP20070135948 申请日期 2007.05.22
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 YAMAJI YASUHIRO;YOKOSHIMA TOKIHIKO;AOYANAGI MASAHIRO;NAKAGAWA HIROSHI;KIKUCHI KATSUYA
分类号 H01L25/065;H01L23/52;H01L25/07;H01L25/18 主分类号 H01L25/065
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