| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor element testing apparatus capable of improving test efficiently and reducing manufacturing costs by generating a constitution, which has been used for generating timing in a conventional apparatus, only by a time delay. SOLUTION: The semiconductor element testing apparatus is provided with a pattern generating part for generating logical test pattern data on the basis of a test pattern program, a data selection part for conversion into physical test pattern data to be transmitted to a DUT and test expected value data on the basis of the test pattern data, a format control part for converting the physical test pattern data into a desired test waveform on the basis of a time delay value set for the execution of test, a driver part for applying the test waveform to the DUT, an output comparison part for receiving output corresponding to the test waveform from the DUT and outputting test execution data, and a test comparison part for comparing the test execution data with the test expected value data and determining the quality of the DUT. COPYRIGHT: (C)2008,JPO&INPIT
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