| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure type noncontact gas seal capable of making seal gas flow smoothly in a seal ring side passage, even if the seal ring side passage is formed by mechanical working such as drilled hole preparation work, and capable of preventing effectively a particle from being generated from a passage inner surface caused by contact with the seal gas, capable of satisfactorily being used as a sealing means for rotary equipment requiring high cleanness. SOLUTION: This static pressure-type non-contact gas seal has the seal ring side passage 37 with an axis penetrated through to an opposed end face 13 opposed to a rotary seal ring 10 while forming a straight line with no bent part in the rotary seal ring 10 by the mechanical working, and the seal gas is supplied between opposed end faces 12, 13 of both the seal rings, 8, 10, from the seal ring side passage 37. A pipe 41 with a flat inner circumferential face not generating the particle by contact with the seal gas G is tightly fit and adhered to an at least intermediate portion of the seal ring side passage 37. COPYRIGHT: (C)2008,JPO&INPIT
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