发明名称 |
MICRO DEVICE WITH MICROTUBES |
摘要 |
The current invention is related to a micro device with microtubes that can be used as a heat exchanger for ultra fast cooling or heating of liquids. Using a damascene metal level in combination with thermal degradable polymer (TDP) enables the manufacturing of compact system of microtubes only separated by a monolayer of metallic barrier material. Due to the small distance (i.e. the thickness of the barrier) between two separate microtubes a highly efficient heat transfer between two fluids circulating in the microtubes is enabled. |
申请公布号 |
WO2007119188(A3) |
申请公布日期 |
2008.02.21 |
申请号 |
WO2007IB51179 |
申请日期 |
2007.04.03 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N. V.;HOOFMAN, ROMANO |
发明人 |
HOOFMAN, ROMANO |
分类号 |
H01L23/473 |
主分类号 |
H01L23/473 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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