发明名称 |
NANO-MICROPHONE OR PRESSURE SENSOR |
摘要 |
The invention relates to a method and a device for measuring or detecting and/or generating of pressures or pressure changes, in particular acoustic vibration and a method for production of such a device. The invention particularly relates to a nano-microphone. The device comprises at least one nano-membrane with a support membrane and at least one counter-electrode, the support membrane having at least one monolayer. |
申请公布号 |
WO2007147643(A3) |
申请公布日期 |
2008.02.21 |
申请号 |
WO2007EP05613 |
申请日期 |
2007.06.25 |
申请人 |
UNIVERSITAET BIELEFELD;GOELZHAEUSER, ARMIN |
发明人 |
GOELZHAEUSER, ARMIN |
分类号 |
B81C1/00;G01L9/00;H04R19/04 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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