FILLING DEVICE FOR HYDRODYNAMIC FLUID BEARING, FILLING METHOD, HYDRODYNAMIC FLUID BEARING UNIT AND SPINDLE MOTOR USING IT

摘要

PROBLEM TO BE SOLVED: To provide a lubricating fluid filling device to a hydrodynamic fluid bearing capable of supplying stable discharge quantity which is little affected by distortion of a vacuum vessel under a decompressed atmosphere. SOLUTION: The filling device for the hydrodynamic fluid bearing is equipped with a dispenser 8 for filling the lubricating fluid in a clearance part of the hydrodynamic fluid bearing 30 provided at a lid part of the vacuum vessel 2 and a lubricating fluid tank 7 for supplying the dispenser 8 with the lubricating fluid and has a base 18 installed via a support part 17 connected to a bottom part of the vacuum vessel 2, a pallet 23 mounting the hydrodynamic fluid bearing 30 on the base 18 and a driving stage 19 for moving the pallet 23 in a rotation direction of X-axis/Z-axis. A sealing member 3 for securing hermetic properties of the vacuum vessel 2 is provided at a vessel body part 2B side of a connection part of the reservoir body part 2B and the lid part 2A of the vacuum vessel 2 and the vacuum vessel 2 is vacuumed from a vacuum exhaust port 15 to be a decompression state and the lubricating fluid is dropped from a nozzle 9 at a tip end of the dispenser 8 and the lubricating oil is filled in the clearance part of the hydrodynamic fluid bearing 30. COPYRIGHT: (C)2008,JPO&INPIT