| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of optical modulator capable of forming a cyclic structure composed of ruggedness of high aspect ratio with respect to an electro-optic crystal of which fine etching working is difficult. SOLUTION: The manufacturing method of an optical waveguide comprises as follow: a first substrate 100 provided with a linear optical waveguide region which is formed with a material having an electro-optic effect and is made by arranging a plurality of protrusion parts and recessed parts cyclicly is prepared; further, a second substrate 200 which is formed with a material having an electro-optic effect and is provided with a linear optical waveguide region made by arranging a plurality of protrusion parts and recessed parts cyclicly is prepared; and, thereafter, the first substrate 100 is stuck to the second substrate 200 so that the protrusion part existing on the optical waveguide region of the first substrate is brought into contact with the protrusion part existing on the optical waveguide region of the second substrate. COPYRIGHT: (C)2008,JPO&INPIT
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