| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal panel inspection method capable of distinguishing an image of dust attached to surfaces of both sides of a liquid crystal panel from a defect in the liquid crystal panel when inspecting the liquid crystal panel without a polarizing plate by using an imaging device. SOLUTION: On a non-lighting inspection part 10, a spot position is determined by illuminating the liquid crystal panel with backlight and imaging the liquid crystal panel while applying no voltage to the liquid crystal panel without the polarizing plate. Subsequently, the spot position is determined by illuminating the liquid crystal panel with an obliquely illuminating light source. Based on the imaging result, a spot due to external dust is removed and the position of an inner defect is specified. Subsequently, the liquid crystal panel 16 is transferred to a lighting inspection part 11, then, is illuminated with the backlight on the lighting inspection part 11 and the spot position is determined. The position on which a defect position specified by the non-lighting inspection part is superimposed on a defect position specified by the lighting inspection part is decided as a real defect position. COPYRIGHT: (C)2008,JPO&INPIT
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