| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-structured angular velocity sensor excelling in responsivity, and to provide a cantilever for an angular velocity sensor. SOLUTION: The angular velocity sensor includes a first spindle part 14 disposed on the fixation side, a first rocking part 12 rocking along the first spindle part, a second spindle part 15 disposed on the first rocking part, a second rocking part 13 rocking along the second spindle part, and a rotating body 35 held on the second rocking part to rotatively drive it. The sensor comprises first and second detection bodies 40-1 and 40-2 provided between the spindle part 12 and the fixation side, and between the rocking parts 12 and 13, respectively, for detecting rocking motions caused by a first rotational angular velocityω1 acting around a shaft having an axis crossing the first spindle part and the rotation axis, and caused by a second rotational angular velocityω2 acting around a shaft having an axis crossing the shaft with the first rotational angular velocity acting thereon and the rotation axis. COPYRIGHT: (C)2008,JPO&INPIT
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