发明名称 MANUFACTURING METHOD OF LAMINATED STRUCTURE, AND MANUFACTURING APPARATUS OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminated structure for manufacturing the laminated structure at a high profile irregularity, and to provide its manufacturing apparatus. SOLUTION: When the laminated structure is manufactured by bonding one structure 1 and the other structure 5 with an adhesive, one structure is sucked to a jig 6 having the high profile irregularity by suction means 7, 8, to overlie the other structure in a state where one structure is corrected. After one structure and the other structure are bonded, the adhesive is cured and immobilized, in a state where the high planar precision is obtained by the jig. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008039487(A) 申请公布日期 2008.02.21
申请号 JP20060211434 申请日期 2006.08.02
申请人 CANON INC;CANON PRECISION INC 发明人 MORIYA AKIRA
分类号 G01D5/36;C09J5/00;G11B7/26 主分类号 G01D5/36
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