| 发明名称 |
SULFUR HEXAFLUORIDE RECYCLING SYSTEM AND METHOD FOR RECYCLING SULFUR HEXAFLUORIDE |
| 摘要 |
<p>The present invention relates to a system and method for the recycling of sulfur hexafluoride (SF6), from a waste gas of a manufacturing process, such as a semiconductor processing method. In particular, the present invention provides a simplified system and method that utilizes additional SF6 as a purge gas for the system pump and allows relatively easy separation of the SF6 from the other waste gas components.</p> |
| 申请公布号 |
WO2008021000(A1) |
申请公布日期 |
2008.02.21 |
| 申请号 |
WO2007US17160 |
申请日期 |
2007.08.01 |
| 申请人 |
THE BOC GROUP, INC.;JANSEN, FRANK;WHITLOCK, WALTER |
发明人 |
JANSEN, FRANK;WHITLOCK, WALTER |
| 分类号 |
B01D53/48 |
主分类号 |
B01D53/48 |
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